Citas bibligráficas
Camacho, W., (2024). Efecto de las partículas energéticas sobre un sustrato sólido durante el depósito de películas delgadas [Universidad Nacional de Trujillo]. https://hdl.handle.net/20.500.14414/21173
Camacho, W., Efecto de las partículas energéticas sobre un sustrato sólido durante el depósito de películas delgadas []. PE: Universidad Nacional de Trujillo; 2024. https://hdl.handle.net/20.500.14414/21173
@mastersthesis{renati/1046400,
title = "Efecto de las partículas energéticas sobre un sustrato sólido durante el depósito de películas delgadas",
author = "Camacho Mamani, Wilson Eduardo",
publisher = "Universidad Nacional de Trujillo",
year = "2024"
}
The study focuses on analyzing the impact of energetic particles on a solid substrate during the thin film deposition process. The research addresses the detailed interaction between energetic particles, such as ions, electrons or atoms with high energy, and the solid substrate, with the objective of describing the formation of thin films deposited by plasma. In the methodology, bibliographic references related to the research and the solutions of differential equations were used to derive the equations on the energy flow and calorimetric processes in the substrate. We found that the heat flux directed to the substrate is a function of the heat flux from the substrate and the transferred power that raises the substrate temperature. Finally, the pressure and the distance between the electrodes influence the heat loss, being by convection less than by conduction.
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